Machine Allocation in Semiconductor Wafer Fabrication Systems: A Simulation-Based Approach

The problem of maximizing the throughput of Semiconductor Wafer Fabrication Systems is addressed. We model the fabrication systems as a Stochastic Timed Automata and design a discrete-event simulation scheme. The simulation scheme is explicit, fast and achieves high fidelity which captures the featu...

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Veröffentlicht in:	Journal of systems science and systems engineering 2023-06, Vol.32 (3), p.372-390
Hauptverfasser:	Wu, Yanfeng, Chen, Sihua
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Automata theory Complexity Decision making Design Discrete event systems Economic Theory/Quantitative Economics/Mathematical Methods Engineering Experiments Manufacturing Operations Research/Decision Theory Optimization Scheduling Semiconductors Simulation
Online-Zugang:	Volltext
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