MEMS multi-vibrating ring gyroscope for space applications
This paper presents the design of a novel multi-ring vibratory gyroscope. The design incorporates two sets of rings, inner and outer, separated by a set of perforated inertial masses and connected to the outermost anchors by the means of springs. The structure’s performance is enhanced by utilizing...
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| Veröffentlicht in: | Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2020-08, Vol.26 (8), p.2527-2533 |
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| container_title | Microsystem technologies : sensors, actuators, systems integration |
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| creator | Gill, Waqas Amin Ali, Dima An, Boo Hyun Syed, Wajih U. Saeed, Numan Al-shaibah, Muneera Elfadel, Ibrahim M. Al Dahmani, Sultan Choi, Daniel S. |
| description | This paper presents the design of a novel multi-ring vibratory gyroscope. The design incorporates two sets of rings, inner and outer, separated by a set of perforated inertial masses and connected to the outermost anchors by the means of springs. The structure’s performance is enhanced by utilizing springs with bends that play a significant role in reducing the device’s sensitivity to external shocks. The amalgamation of multiple rings with the C-shaped springs provides higher sensitivity with high shock resistance that makes this multi-vibrating ring gyroscope an ideal inertial sensor for space applications. Such a structure yields in-plane flexural modes that are utilized to sense rotation along the axis normal to the structure’s plane. |
| doi_str_mv | 10.1007/s00542-020-04793-x |
| format | Article |
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Such a structure yields in-plane flexural modes that are utilized to sense rotation along the axis normal to the structure’s plane.</description><subject>Bends</subject><subject>Design</subject><subject>Electrodes</subject><subject>Electronics and Microelectronics</subject><subject>Engineering</subject><subject>Inertial sensing devices</subject><subject>Instrumentation</subject><subject>Mechanical Engineering</subject><subject>Nanotechnology</subject><subject>Navigation systems</subject><subject>Sensitivity</subject><subject>Sensors</subject><subject>Shock resistance</subject><subject>Space applications</subject><subject>Springs (elastic)</subject><subject>Technical Paper</subject><subject>Velocity</subject><subject>Vibration</subject><subject>Vibratory gyroscopes</subject><issn>0946-7076</issn><issn>1432-1858</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><sourceid>BENPR</sourceid><recordid>eNp9kMtOwzAQRS0EEqXwA6wisTaMH_GDHarKQ2rFAlhbTmpXqdrG2Alq_x6HILFjMzOLe-7MXISuCdwSAHmXAEpOMVDAwKVm-HCCJoQziokq1SmagOYCS5DiHF2ktIEMacUm6H45X74Vu37bNfirqaLtmv26iENZH2Ob6ja4wrexSMHWrrAhbJs6i9p9ukRn3m6Tu_rtU_TxOH-fPePF69PL7GGBa0Z0h52wVS2c8KL0K6m04kx7L_NIKkdLorm3XDjumGWCScaBCqqcoFqulLCcTdHN6Bti-9m71JlN28d9XmmoJgpKJanMKjqq6nx1is6bEJudjUdDwAwZmTEjkzMyPxmZQ4bYCKUwvOzin_U_1Dci32lA</recordid><startdate>20200801</startdate><enddate>20200801</enddate><creator>Gill, Waqas Amin</creator><creator>Ali, Dima</creator><creator>An, Boo Hyun</creator><creator>Syed, Wajih U.</creator><creator>Saeed, Numan</creator><creator>Al-shaibah, Muneera</creator><creator>Elfadel, Ibrahim M.</creator><creator>Al Dahmani, Sultan</creator><creator>Choi, Daniel S.</creator><general>Springer Berlin Heidelberg</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>AFKRA</scope><scope>ARAPS</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>KB.</scope><scope>L6V</scope><scope>M7S</scope><scope>P5Z</scope><scope>P62</scope><scope>PDBOC</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PTHSS</scope></search><sort><creationdate>20200801</creationdate><title>MEMS multi-vibrating ring gyroscope for space applications</title><author>Gill, Waqas Amin ; 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The design incorporates two sets of rings, inner and outer, separated by a set of perforated inertial masses and connected to the outermost anchors by the means of springs. The structure’s performance is enhanced by utilizing springs with bends that play a significant role in reducing the device’s sensitivity to external shocks. The amalgamation of multiple rings with the C-shaped springs provides higher sensitivity with high shock resistance that makes this multi-vibrating ring gyroscope an ideal inertial sensor for space applications. Such a structure yields in-plane flexural modes that are utilized to sense rotation along the axis normal to the structure’s plane.</abstract><cop>Berlin/Heidelberg</cop><pub>Springer Berlin Heidelberg</pub><doi>10.1007/s00542-020-04793-x</doi><tpages>7</tpages></addata></record> |
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| source | Springer Nature - Complete Springer Journals; ProQuest Central |
| subjects | Bends Design Electrodes Electronics and Microelectronics Engineering Inertial sensing devices Instrumentation Mechanical Engineering Nanotechnology Navigation systems Sensitivity Sensors Shock resistance Space applications Springs (elastic) Technical Paper Velocity Vibration Vibratory gyroscopes |
| title | MEMS multi-vibrating ring gyroscope for space applications |
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