MEMS multi-vibrating ring gyroscope for space applications

This paper presents the design of a novel multi-ring vibratory gyroscope. The design incorporates two sets of rings, inner and outer, separated by a set of perforated inertial masses and connected to the outermost anchors by the means of springs. The structure’s performance is enhanced by utilizing springs with bends that play a significant role in reducing the device’s sensitivity to external shocks. The amalgamation of multiple rings with the C-shaped springs provides higher sensitivity with high shock resistance that makes this multi-vibrating ring gyroscope an ideal inertial sensor for space applications. Such a structure yields in-plane flexural modes that are utilized to sense rotation along the axis normal to the structure’s plane.