Fabrication of a surface stress-based PDMS micro-membrane biosensor

With the development of technology and society, biosensors are more and more important in the areas of healthcare. Specially, the design and fabrication of perfect biosensors play a crucial role in the whole process. In the paper, a surface stress-based polydimethylsiloxane (PDMS) micro membrane biosensor array has been fabricated based on the surface and bulk microfabrication technology. The challenges in fabrication, such as integration of PDMS processing with conventional microfabrication processes, were successfully mastered to build the biosensor. In addition, the bonding technique, uncured PDMS as the intermediate layer for bonding the biosensor with microfluidic devices or components, has been developed to later construct the BioMEMS. Bond strength is close to that of bulk PDMS. Through the bio-experiments to Escherichia coli ( E. coli ), the cells can be detected based on the membrane deflection induced by surface stress.