Planar Magnetron with Heated Boron Target for In Situ Investigation of Boron Film Deposition
Planar magnetrons with a heated crystalline boron target are promising for depositing boron coatings intended for a wide range of scientific and industrial applications. The promotion of this type of magnetrons requires an in-depth investigation of the coating deposition process. A new version of su...
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| Veröffentlicht in: | Russian physics journal 2023-12, Vol.66 (10), p.1108-1113 |
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| container_title | Russian physics journal |
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| creator | Bugaev, A. S. Cherkasov, A. A. Frolova, V. P. Gushenets, V. I. Nikolaev, A. G. Oks, E. M. Savkin, K. P. Shandrikov, M. V. Vizir, A. V. |
| description | Planar magnetrons with a heated crystalline boron target are promising for depositing boron coatings intended for a wide range of scientific and industrial applications. The promotion of this type of magnetrons requires an in-depth investigation of the coating deposition process. A new version of such a magnetron is created for the vacuum electron-ion-plasma (VEIP) test installation for in situ synchrotron radiation monitoring of the boron coating synthesis. The paper proposes the design and parameters for this magnetron and discusses the boron coating deposition using the VEIP test installation. |
| doi_str_mv | 10.1007/s11182-023-03050-8 |
| format | Article |
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S.</creatorcontrib><creatorcontrib>Cherkasov, A. A.</creatorcontrib><creatorcontrib>Frolova, V. P.</creatorcontrib><creatorcontrib>Gushenets, V. I.</creatorcontrib><creatorcontrib>Nikolaev, A. G.</creatorcontrib><creatorcontrib>Oks, E. M.</creatorcontrib><creatorcontrib>Savkin, K. P.</creatorcontrib><creatorcontrib>Shandrikov, M. V.</creatorcontrib><creatorcontrib>Vizir, A. V.</creatorcontrib><title>Planar Magnetron with Heated Boron Target for In Situ Investigation of Boron Film Deposition</title><title>Russian physics journal</title><addtitle>Russ Phys J</addtitle><description>Planar magnetrons with a heated crystalline boron target are promising for depositing boron coatings intended for a wide range of scientific and industrial applications. The promotion of this type of magnetrons requires an in-depth investigation of the coating deposition process. 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The paper proposes the design and parameters for this magnetron and discusses the boron coating deposition using the VEIP test installation.</description><subject>Boron</subject><subject>Coatings</subject><subject>Condensed Matter Physics</subject><subject>Deposition</subject><subject>Design parameters</subject><subject>Hadrons</subject><subject>Heavy Ions</subject><subject>Industrial applications</subject><subject>Investigations</subject><subject>Lasers</subject><subject>Magnetrons</subject><subject>Mathematical and Computational Physics</subject><subject>Measurement</subject><subject>Nuclear Physics</subject><subject>Optical Devices</subject><subject>Optics</subject><subject>Photonics</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Plasma Physics</subject><subject>Radiation</subject><subject>Radiation measurement</subject><subject>Synchrotron radiation</subject><subject>Synchrotrons</subject><subject>Theoretical</subject><issn>1064-8887</issn><issn>1573-9228</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2023</creationdate><recordtype>article</recordtype><recordid>eNp9kF1LwzAUhosoOKd_wKuC15n5aJr0ck7nBhMF550Q0japGV0yk0zx35tZwTvJxQknz3NyeLPsEsEJgpBdB4QQxwBiAiCBFAJ-lI0QZQRUGPPjdIdlATjn7DQ7C2EDYdJKNspen3pppc8fZGdV9M7mnya-5Qslo2rzG3forKXvVMy18_nS5s8m7lP9UCGaTkaTAKd_ybnpt_mt2rlgDg_n2YmWfVAXv3Wcvczv1rMFWD3eL2fTFWgIrCKgrGY1xjVtJJYlaqlUTVGToqkYwghrhltacV2rkhHSIFTXpMKQlW0B65KWkoyzq2Huzrv3fVpMbNze2_SlwBUsSsgJLhI1GahO9koYq130skmnVVvTOKu0Sf0p44hiUtEqCXgQGu9C8EqLnTdb6b8EguIQuxhiFyl28RO74EkigxQSbDvl_3b5x_oG0ueEEA</recordid><startdate>20231201</startdate><enddate>20231201</enddate><creator>Bugaev, A. 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S.</creatorcontrib><creatorcontrib>Cherkasov, A. A.</creatorcontrib><creatorcontrib>Frolova, V. P.</creatorcontrib><creatorcontrib>Gushenets, V. I.</creatorcontrib><creatorcontrib>Nikolaev, A. G.</creatorcontrib><creatorcontrib>Oks, E. M.</creatorcontrib><creatorcontrib>Savkin, K. P.</creatorcontrib><creatorcontrib>Shandrikov, M. V.</creatorcontrib><creatorcontrib>Vizir, A. V.</creatorcontrib><collection>CrossRef</collection><jtitle>Russian physics journal</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Bugaev, A. S.</au><au>Cherkasov, A. A.</au><au>Frolova, V. P.</au><au>Gushenets, V. I.</au><au>Nikolaev, A. G.</au><au>Oks, E. M.</au><au>Savkin, K. P.</au><au>Shandrikov, M. V.</au><au>Vizir, A. V.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Planar Magnetron with Heated Boron Target for In Situ Investigation of Boron Film Deposition</atitle><jtitle>Russian physics journal</jtitle><stitle>Russ Phys J</stitle><date>2023-12-01</date><risdate>2023</risdate><volume>66</volume><issue>10</issue><spage>1108</spage><epage>1113</epage><pages>1108-1113</pages><issn>1064-8887</issn><eissn>1573-9228</eissn><abstract>Planar magnetrons with a heated crystalline boron target are promising for depositing boron coatings intended for a wide range of scientific and industrial applications. The promotion of this type of magnetrons requires an in-depth investigation of the coating deposition process. A new version of such a magnetron is created for the vacuum electron-ion-plasma (VEIP) test installation for in situ synchrotron radiation monitoring of the boron coating synthesis. 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| subjects | Boron Coatings Condensed Matter Physics Deposition Design parameters Hadrons Heavy Ions Industrial applications Investigations Lasers Magnetrons Mathematical and Computational Physics Measurement Nuclear Physics Optical Devices Optics Photonics Physics Physics and Astronomy Plasma Physics Radiation Radiation measurement Synchrotron radiation Synchrotrons Theoretical |
| title | Planar Magnetron with Heated Boron Target for In Situ Investigation of Boron Film Deposition |
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