A Microfabricated Nanobubble-Based Sensor for Physiological Pressure Monitoring

A microfabricated nanobubble-based sensor was developed for real-time physiological pressure monitoring. The fully immersed sensor utilizes an electrolytic bubble generated and localized within a microfluidic channel that is in communication with the local environment. Bubble size varies with local...

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Veröffentlicht in:	Journal of microelectromechanical systems 2023-12, Vol.32 (6), p.542-551
Hauptverfasser:	Wang, Xuechun, Yoon, Eugene, Meng, Ellis
Format:	Artikel
Sprache:	eng
Schlagworte:	Biomedical monitoring electrochemical impedance sensing Electrodes Fluids Impedance intracranial pressure sensing Intracranial pressure sensors Microchannels Monitoring Nanobubble-based sensor Nanoscale devices Parylene C Parylene-based sensor Pressure sensors Valves
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