A Microfabricated Nanobubble-Based Sensor for Physiological Pressure Monitoring

A microfabricated nanobubble-based sensor was developed for real-time physiological pressure monitoring. The fully immersed sensor utilizes an electrolytic bubble generated and localized within a microfluidic channel that is in communication with the local environment. Bubble size varies with local...

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Veröffentlicht in:Journal of microelectromechanical systems 2023-12, Vol.32 (6), p.542-551
Hauptverfasser: Wang, Xuechun, Yoon, Eugene, Meng, Ellis
Format: Artikel
Sprache:eng
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Zusammenfassung:A microfabricated nanobubble-based sensor was developed for real-time physiological pressure monitoring. The fully immersed sensor utilizes an electrolytic bubble generated and localized within a microfluidic channel that is in communication with the local environment. Bubble size varies with local pressure changes, allowing pressure to be monitored by tracking the resulting electrochemical impedance changes. An asymmetric electrode pair bubble generator design achieved precise picoliter-volume bubble control using either oxygen or hydrogen gas. Precise pressure monitoring down to a resolution of 1 mmHg (0.13-kPa) was achieved using long-lasting (>4 hours) oxygen bubbles tracked under a quasi-stable regime bounded by distinct, traceable bubble-channel wall detachment interac- tions. This corresponds to a 20\times improvement in resolution compared to microbubble-based pressure sensors reported to date. [2023-0077]
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2023.3309873