Large-Scale Atomistic Simulation of the Structure of ZnO Films
The model of large-scale molecular dynamics simulation of the deposition of the ZnO films is developed. The dependence of the films structure on the deposition angle is studied for the case of high-energy deposition. The formation of nanostructured films at large deposition angle is demonstrated. Th...
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Veröffentlicht in: | Lobachevskii journal of mathematics 2023-08, Vol.44 (8), p.3068-3075 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | The model of large-scale molecular dynamics simulation of the deposition of the ZnO films is developed. The dependence of the films structure on the deposition angle is studied for the case of high-energy deposition. The formation of nanostructured films at large deposition angle is demonstrated. The numerical efficiency of the model is discussed. |
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ISSN: | 1995-0802 1818-9962 |
DOI: | 10.1134/S199508022308019X |