Large-Scale Atomistic Simulation of the Structure of ZnO Films

The model of large-scale molecular dynamics simulation of the deposition of the ZnO films is developed. The dependence of the films structure on the deposition angle is studied for the case of high-energy deposition. The formation of nanostructured films at large deposition angle is demonstrated. Th...

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Veröffentlicht in:Lobachevskii journal of mathematics 2023-08, Vol.44 (8), p.3068-3075
Hauptverfasser: Grigoriev, F. V., Sulimov, V. B., Tikhonravov, A. V.
Format: Artikel
Sprache:eng
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Zusammenfassung:The model of large-scale molecular dynamics simulation of the deposition of the ZnO films is developed. The dependence of the films structure on the deposition angle is studied for the case of high-energy deposition. The formation of nanostructured films at large deposition angle is demonstrated. The numerical efficiency of the model is discussed.
ISSN:1995-0802
1818-9962
DOI:10.1134/S199508022308019X