Planar On-Silicon Inductor Design for Electromagnetic Tracking

In this paper, a planar on-silicon inductor design for electromagnetic tracking is presented. The design process has been demonstrated for a planar sensing coil in a 65 nm on-silicon process. The designed multilayer planar inductor configuration achieves SNR of 23.6 dB and sensitivity of 202 μ V/T/Hz . The designed inductor satisfies system requirements for clinical use in electromagnetic tracking applications. The current design has been verified on the TSMC 65 nm process and exhibits a close correlation with simulation results. Measured SNR of 22.1 dB and sensitivity of 198 μ V/T/Hz at a frequency of 20 kHz and magnetic flux density of 150 nT is achieved. An improved lumped element model to account for multi-layer planar inductor designs is also proposed.