Development of a Probe System for Measuring Plasma Parameters under Conditions of Plasma Polymerization and Synthesis of Nanostructures

In this work, the probe system developed by us earlier for plasma diagnostics under the conditions of plasma polymerization and synthesis of carbon nanostructures was constructively developed. The probe system is supplemented with a block that allows cleaning the probe with ion current, as well as o...

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Veröffentlicht in:High energy chemistry 2023-10, Vol.57 (Suppl 1), p.S172-S177
Hauptverfasser: Saifutdinov, A. I., Sysoev, S. S., Gushchin, D. D.
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container_issue Suppl 1
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container_title High energy chemistry
container_volume 57
creator Saifutdinov, A. I.
Sysoev, S. S.
Gushchin, D. D.
description In this work, the probe system developed by us earlier for plasma diagnostics under the conditions of plasma polymerization and synthesis of carbon nanostructures was constructively developed. The probe system is supplemented with a block that allows cleaning the probe with ion current, as well as obtaining the second derivative of the probe current-voltage characteristic by the harmonic method. The probe system was tested on the example of plasma diagnostics in a mixture of He + 0.1% CH 4 .
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subjects Chemical synthesis
Chemistry
Chemistry and Materials Science
Current voltage characteristics
Ion currents
Nanostructure
Physical Chemistry
Plasma diagnostics
Polymerization
title Development of a Probe System for Measuring Plasma Parameters under Conditions of Plasma Polymerization and Synthesis of Nanostructures
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