Development of a Probe System for Measuring Plasma Parameters under Conditions of Plasma Polymerization and Synthesis of Nanostructures

In this work, the probe system developed by us earlier for plasma diagnostics under the conditions of plasma polymerization and synthesis of carbon nanostructures was constructively developed. The probe system is supplemented with a block that allows cleaning the probe with ion current, as well as obtaining the second derivative of the probe current-voltage characteristic by the harmonic method. The probe system was tested on the example of plasma diagnostics in a mixture of He + 0.1% CH 4 .