Methods for Forming Gas, Cluster Spray, and Liquid Targets in a Laser-Plasma Radiation Source

Methods for Forming Gas, Cluster Spray, and Liquid Targets in a Laser-Plasma Radiation Source

Methods for the formation of liquid, microdroplet, cluster, and gas targets in vacuum for use in laser-plasma radiation sources are considered. The characteristics of the used target-formation systems and gas-supply systems based on them are given. These systems form pulsed and static jets with low...

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Veröffentlicht in:Instruments and experimental techniques (New York) 2023-08, Vol.66 (4), p.702-711
Hauptverfasser: Guseva, V. E., Korepanov, M. A., Koroleva, M. R., Nechay, A. N., Perekalov, A. A., Salashchenko, N. N., Chkhalo, N. I.
Format: Artikel
Sprache:eng
Schlagworte:
Clusters
Electrical Engineering
Laboratory Technology
Mass flow
Measurement Science and Instrumentation
Physical Chemistry
Physics
Physics and Astronomy
Plasma radiation
Radiation sources
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Beschreibung
Zusammenfassung:Methods for the formation of liquid, microdroplet, cluster, and gas targets in vacuum for use in laser-plasma radiation sources are considered. The characteristics of the used target-formation systems and gas-supply systems based on them are given. These systems form pulsed and static jets with low mass flow, on the order of ~70 mL/h of liquid or 1500 cm 3 /h of gas, which allows pumping out the vacuum volume with one turbomolecular pump with a capacity of 1000 L/s.
ISSN:0020-4412
1608-3180
DOI:10.1134/S0020441223030193