Spurious Mitigation of Layered Surface Acoustic Wave Resonators With Double-Busbar Configuration Using 42°YX-Lithium Tantalate Thin Plate

This article investigates a spurious resonance appearing near the antiresonance when the double-busbar configuration is applied to layered surface acoustic wave (SAW) resonators using 42°YX-LiTaO3 thin plates, and possible mitigation methods are studied both theoretically and experimentally. First,...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	IEEE transactions on microwave theory and techniques 2023-08, Vol.71 (8), p.3493-3500
Hauptverfasser:	He, Yiwen, Wu, Ting, Yang, Ying, Workie, Temesgen Bailie, Shuai, Yao, Wu, Chuangui, Bao, Jingfu, Hashimoto, Ken-ya
Format:	Artikel
Sprache:	eng
Schlagworte:	Busbars Configurations Finite element method Lithium tantalates Resonance Resonators Surface acoustic wave devices Thin plates
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	This article investigates a spurious resonance appearing near the antiresonance when the double-busbar configuration is applied to layered surface acoustic wave (SAW) resonators using 42°YX-LiTaO3 thin plates, and possible mitigation methods are studied both theoretically and experimentally. First, the origin of the spurious resonance is revealed, and the influence of structural parameters is studied using the periodic 3-D finite-element method (FEM) powered by the hierarchical cascading technique (HCT). Then, possible methods are discussed for spurious mitigation. Finally, experimental data are provided for validation of the present analysis.
ISSN:	0018-9480 1557-9670
DOI:	10.1109/TMTT.2023.3253382