Surface analysis insight note: Straightforward concentration depth profiling by angle‐resolved X‐ray photoelectron spectroscopy using a Tikhonov regularization algorithm

Angle‐resolved X‐ray photoelectron spectroscopy (ARXPS) is a technique used for depth‐dependent analysis in the near‐surface region of samples. Calculation of a concentration depth profile using ARXPS requires an inverse Laplace transform, which adds considerable complexity to the analysis. In this insight note, the Tikhonov regularization algorithm for depth profile reconstruction from ARXPS data is examined. The steps required to produce a concentration depth profile are provided. The discussion includes strategies that deal with elastic scattering, electron attenuation, choice of regularization terms and optimization of the regularization parameters. The method is implemented in a Microsoft Excel spreadsheet that allows users to calculate a depth profile for data collected at up to five angles for five different peak components.