Fabrication and characterization of nano-ZnO/CNTs/PDMS flexible pressure sensor

Polydimethylsiloxane (PDMS) is widely used as an elastic substrate for flexible pressure sensors. Functional materials integrated into the network of PDMS are usually able to enhance sensing performance. In this work, carbon nanotubes (CNTs) mixed with nano-zinc oxide (nano-ZnO) were used as conductive filler to prepare nano-ZnO/CNTs/PDMS active layer to assemble a flexible pressure sensor. At 0 ~ 10 kPa, nano-ZnO/CNTs/PDMS pressure sensor exhibits a sensitivity of 0.18 kPa −1 and a response time of 45.5 ms. The results confirm that the combination of CNTs and nano-ZnO provides the PDMS substrate with improved pressure sensing properties. Moreover, the nano-ZnO/CNTs/PDMS sensor maintains a good stability after 6000 cycles. After assembly, the nano-ZnO/CNTs/PDMS sensor could be used to monitor the movement of various body parts.