Micro-actuation systems based on phase transformation films

Actuation is essential for the development of micro/nano electro-mechanical systems and the use of shape memory materials can be a solution for such a need. These materials exhibit structural phase transformation which is associated with changes in the thermo/magnetic/mechanical properties that can be used to control the actuation in various architectures. The magnetron sputtering deposition of films from such materials allows the generation of simple and complex architectures that can be used for micro and nanoactuation. This paper details several solutions to generate micro/nano actuation in bimorph and more complex architectures, and the way to control the actuation profile as a function of the phase transformation degree in the film.