Spatially Controlled Single Photon Emitters in hBN‐Capped WS2 Domes

Monolayers (MLs) of transition‐metal dichalcogenides host efficient single‐photon emitters (SPEs) usually associated to the presence of nanoscale mechanical deformations or strain. Large‐scale spatial control of strain would enhance the scalability of such SPEs and allow for their incorporation into photonic structures. Here, the formation of regular arrays of strained hydrogen‐filled one‐layer‐thick micro‐domes obtained by H‐ion irradiation and lithography‐based approaches is reported. Typically, the H2 liquefaction for temperatures T