Simulation Study on Removal Mechanism of Si3N4 Ceramic in Rotary Ultrasonic Grinding

Hot-pressed Si 3 N 4 ceramic is a kind of high-performance ceramic material, which is widely used in national defense, aerospace, and other professional fields. Aiming at the problem of poor surface quality of Si 3 N 4 ceramic material, the paper carried out a simulation study on the removal mechanism of Si 3 N 4 ceramic by rotary ultrasonic grinding. The study provides a theoretical basis for improving the surface quality and processing efficiency of hot-pressed Si 3 N 4 ceramics. Combined with dynamic simulation software to complete single abrasive and double abrasive rotary ultrasonic grinding simulation. Material removal and surface crack propagation in single and double abrasive grains rotary ultrasonic grinding of Si 3 N 4 ceramic were analyzed by crack propagation theory. The grinding force of Si 3 N 4 ceramics with different ultrasonic amplitude and grinding depth and the local stress change at the time of crack generation with different ultrasonic amplitude were compared and analyzed. Complete single abrasive and double abrasive rotary ultrasonic scratch test. The grinding force and surface crack generation obtained by rotary ultrasonic scratch test and rotary ultrasonic grinding simulation were analyzed. The maximum error of the simulation results of single-grain and double-grain rotary ultrasonic grinding is 12.8% and 14.7% respectively. The surface crack of the scratch test workpiece is consistent with the simulation results.