A Self-Latching MEMS Optical Interrupter With Status Monitoring for Laser Initiation System
A novel self-latching MEMS optical interrupter with status monitoring is proposed to enhance the safety of laser initiation system (LIS) by preventing long-term heat accumulation and reducing response time. The electrothermal-actuated interrupter consists of an optical fiber alignment actuator, a po...
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| Veröffentlicht in: | IEEE transactions on electron devices 2023-05, Vol.70 (5), p.1-8 |
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| container_title | IEEE transactions on electron devices |
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| creator | Kong, Xiaoyu Cao, Yun Zhu, Hengbo Nie, Weirong Xi, Zhanwen |
| description | A novel self-latching MEMS optical interrupter with status monitoring is proposed to enhance the safety of laser initiation system (LIS) by preventing long-term heat accumulation and reducing response time. The electrothermal-actuated interrupter consists of an optical fiber alignment actuator, a positive latching actuator (PLA), and a reverse blocking actuator, each coupled with a status monitoring unit. The PLA is equipped with an interlock mechanism for self-latching capability. The interrupter's operating state is monitored using cantilever beams that function as travel switches. The interrupters are fabricated using deep reactive ion etching (DRIE) on silicon-on-insulator (SOI) wafers. Experiments are conducted to study the behavior of the proposed interrupter, which demonstrates the successful implementation of its self-latching and status-monitoring features. The interrupter has a switching time of less than 64 ms and exhibits an optical efficiency ranging from 63% to 68% (1.67-1.97-dB insertion loss) with a maximum power transfer of 865 mW from a 1272-mW input. |
| doi_str_mv | 10.1109/TED.2023.3255159 |
| format | Article |
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The electrothermal-actuated interrupter consists of an optical fiber alignment actuator, a positive latching actuator (PLA), and a reverse blocking actuator, each coupled with a status monitoring unit. The PLA is equipped with an interlock mechanism for self-latching capability. The interrupter's operating state is monitored using cantilever beams that function as travel switches. The interrupters are fabricated using deep reactive ion etching (DRIE) on silicon-on-insulator (SOI) wafers. Experiments are conducted to study the behavior of the proposed interrupter, which demonstrates the successful implementation of its self-latching and status-monitoring features. The interrupter has a switching time of less than 64 ms and exhibits an optical efficiency ranging from 63% to 68% (1.67-1.97-dB insertion loss) with a maximum power transfer of 865 mW from a 1272-mW input.</description><identifier>ISSN: 0018-9383</identifier><identifier>EISSN: 1557-9646</identifier><identifier>DOI: 10.1109/TED.2023.3255159</identifier><identifier>CODEN: IETDAI</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Actuators ; Cantilever beams ; Electrothermal-actuated ; Insertion loss ; Interrupters ; laser initiation system (LIS) ; Maximum power transfer ; MEMS optical interrupter ; Micromechanical devices ; Monitoring ; Optical device fabrication ; Optical fibers ; Optical switches ; Programmable logic arrays ; Reactive ion etching ; self-latching ; SOI (semiconductors) ; status monitoring ; Switches</subject><ispartof>IEEE transactions on electron devices, 2023-05, Vol.70 (5), p.1-8</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2023</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c292t-4f1b2673132df6ff2d3a6f14775865e0d82111e0c8b7f74d10776d459893ba253</citedby><cites>FETCH-LOGICAL-c292t-4f1b2673132df6ff2d3a6f14775865e0d82111e0c8b7f74d10776d459893ba253</cites><orcidid>0000-0001-6003-2985 ; 0000-0002-5376-2362 ; 0000-0003-0175-4923 ; 0000-0002-0936-8990</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/10068330$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27903,27904,54736</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/10068330$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Kong, Xiaoyu</creatorcontrib><creatorcontrib>Cao, Yun</creatorcontrib><creatorcontrib>Zhu, Hengbo</creatorcontrib><creatorcontrib>Nie, Weirong</creatorcontrib><creatorcontrib>Xi, Zhanwen</creatorcontrib><title>A Self-Latching MEMS Optical Interrupter With Status Monitoring for Laser Initiation System</title><title>IEEE transactions on electron devices</title><addtitle>TED</addtitle><description>A novel self-latching MEMS optical interrupter with status monitoring is proposed to enhance the safety of laser initiation system (LIS) by preventing long-term heat accumulation and reducing response time. The electrothermal-actuated interrupter consists of an optical fiber alignment actuator, a positive latching actuator (PLA), and a reverse blocking actuator, each coupled with a status monitoring unit. The PLA is equipped with an interlock mechanism for self-latching capability. The interrupter's operating state is monitored using cantilever beams that function as travel switches. The interrupters are fabricated using deep reactive ion etching (DRIE) on silicon-on-insulator (SOI) wafers. Experiments are conducted to study the behavior of the proposed interrupter, which demonstrates the successful implementation of its self-latching and status-monitoring features. The interrupter has a switching time of less than 64 ms and exhibits an optical efficiency ranging from 63% to 68% (1.67-1.97-dB insertion loss) with a maximum power transfer of 865 mW from a 1272-mW input.</description><subject>Actuators</subject><subject>Cantilever beams</subject><subject>Electrothermal-actuated</subject><subject>Insertion loss</subject><subject>Interrupters</subject><subject>laser initiation system (LIS)</subject><subject>Maximum power transfer</subject><subject>MEMS optical interrupter</subject><subject>Micromechanical devices</subject><subject>Monitoring</subject><subject>Optical device fabrication</subject><subject>Optical fibers</subject><subject>Optical switches</subject><subject>Programmable logic arrays</subject><subject>Reactive ion etching</subject><subject>self-latching</subject><subject>SOI (semiconductors)</subject><subject>status monitoring</subject><subject>Switches</subject><issn>0018-9383</issn><issn>1557-9646</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2023</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpNkDFPwzAQRi0EEqWwMzBYYk7x2bHjjFUpUClVhxQxMFhuYlNXbVJsZ-i_J1E7sNzpTu-7kx5Cj0AmACR_Wc9fJ5RQNmGUc-D5FRoB51mSi1RcoxEhIJOcSXaL7kLY9aNIUzpC31Ncmr1NCh2rrWt-8HK-LPHqGF2l93jRRON9d-wr_nJxi8uoYxfwsm1cbP3A29bjQoceWPQ7p6NrG1yeQjSHe3Rj9T6Yh0sfo8-3-Xr2kRSr98VsWiQVzWlMUgsbKjIGjNZWWEtrpoWFNMu4FNyQWlIAMKSSm8xmaQ0ky0Sd8lzmbKMpZ2P0fL579O1vZ0JUu7bzTf9SUUlSAAYwUORMVb4NwRurjt4dtD8pIGpQqHqFalCoLgr7yNM54owx_3AiJGOE_QHKOGtt</recordid><startdate>20230501</startdate><enddate>20230501</enddate><creator>Kong, Xiaoyu</creator><creator>Cao, Yun</creator><creator>Zhu, Hengbo</creator><creator>Nie, Weirong</creator><creator>Xi, Zhanwen</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0001-6003-2985</orcidid><orcidid>https://orcid.org/0000-0002-5376-2362</orcidid><orcidid>https://orcid.org/0000-0003-0175-4923</orcidid><orcidid>https://orcid.org/0000-0002-0936-8990</orcidid></search><sort><creationdate>20230501</creationdate><title>A Self-Latching MEMS Optical Interrupter With Status Monitoring for Laser Initiation System</title><author>Kong, Xiaoyu ; Cao, Yun ; Zhu, Hengbo ; Nie, Weirong ; Xi, Zhanwen</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c292t-4f1b2673132df6ff2d3a6f14775865e0d82111e0c8b7f74d10776d459893ba253</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2023</creationdate><topic>Actuators</topic><topic>Cantilever beams</topic><topic>Electrothermal-actuated</topic><topic>Insertion loss</topic><topic>Interrupters</topic><topic>laser initiation system (LIS)</topic><topic>Maximum power transfer</topic><topic>MEMS optical interrupter</topic><topic>Micromechanical devices</topic><topic>Monitoring</topic><topic>Optical device fabrication</topic><topic>Optical fibers</topic><topic>Optical switches</topic><topic>Programmable logic arrays</topic><topic>Reactive ion etching</topic><topic>self-latching</topic><topic>SOI (semiconductors)</topic><topic>status monitoring</topic><topic>Switches</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kong, Xiaoyu</creatorcontrib><creatorcontrib>Cao, Yun</creatorcontrib><creatorcontrib>Zhu, Hengbo</creatorcontrib><creatorcontrib>Nie, Weirong</creatorcontrib><creatorcontrib>Xi, Zhanwen</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE transactions on electron devices</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kong, Xiaoyu</au><au>Cao, Yun</au><au>Zhu, Hengbo</au><au>Nie, Weirong</au><au>Xi, Zhanwen</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A Self-Latching MEMS Optical Interrupter With Status Monitoring for Laser Initiation System</atitle><jtitle>IEEE transactions on electron devices</jtitle><stitle>TED</stitle><date>2023-05-01</date><risdate>2023</risdate><volume>70</volume><issue>5</issue><spage>1</spage><epage>8</epage><pages>1-8</pages><issn>0018-9383</issn><eissn>1557-9646</eissn><coden>IETDAI</coden><abstract>A novel self-latching MEMS optical interrupter with status monitoring is proposed to enhance the safety of laser initiation system (LIS) by preventing long-term heat accumulation and reducing response time. The electrothermal-actuated interrupter consists of an optical fiber alignment actuator, a positive latching actuator (PLA), and a reverse blocking actuator, each coupled with a status monitoring unit. The PLA is equipped with an interlock mechanism for self-latching capability. The interrupter's operating state is monitored using cantilever beams that function as travel switches. The interrupters are fabricated using deep reactive ion etching (DRIE) on silicon-on-insulator (SOI) wafers. Experiments are conducted to study the behavior of the proposed interrupter, which demonstrates the successful implementation of its self-latching and status-monitoring features. The interrupter has a switching time of less than 64 ms and exhibits an optical efficiency ranging from 63% to 68% (1.67-1.97-dB insertion loss) with a maximum power transfer of 865 mW from a 1272-mW input.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TED.2023.3255159</doi><tpages>8</tpages><orcidid>https://orcid.org/0000-0001-6003-2985</orcidid><orcidid>https://orcid.org/0000-0002-5376-2362</orcidid><orcidid>https://orcid.org/0000-0003-0175-4923</orcidid><orcidid>https://orcid.org/0000-0002-0936-8990</orcidid></addata></record> |
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| subjects | Actuators Cantilever beams Electrothermal-actuated Insertion loss Interrupters laser initiation system (LIS) Maximum power transfer MEMS optical interrupter Micromechanical devices Monitoring Optical device fabrication Optical fibers Optical switches Programmable logic arrays Reactive ion etching self-latching SOI (semiconductors) status monitoring Switches |
| title | A Self-Latching MEMS Optical Interrupter With Status Monitoring for Laser Initiation System |
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