Development of new co-planar platform configuration of MOX gas sensor

In this article, a new configuration of MOX gas sensor was designed, fabricated, and characterized, with a particular design including a micro-heater and a sensing electrode on the same plane using uncomplicated and low-cost steps. A spiral form of the micro-heater and sensing electrode were fabricated in 5 mm × 5 mm surface on a Si/SiO 2 /Al-0.5Cu. Owing to its high sensitivity in gas sensing, the SnO 2 layer was deposited on the top of the sensor. The performances of the fabricated sensor were performed by electrical characterization and sensing behavior under ethanol, LPG, and natural gas. The thermal characterization gave a TCR of 3.2 × 10 −3 °C −1 for SnO 2 /Al-0.5Cu micro-heater. The evolution under gases of the typical device at different temperatures ranging from 218 to 280 °C and relative humidity from 40% to more than 80% showed high response, stability, and reproducibility. The selectivity of the fabricated sensor towards ethanol makes it a perfect candidate for ethanol sensing.