Formation and characterization of NiO and NiO:Al thin films prepared by chemical spray pyrolysis CSP

NiO and NiO: Al films were fabricated employing chemical spray pyrolysis (CSP) technique. XRD indicate a polycrystalline structure and dominant direction at (012), the grain size raised from 11. 55 nm to 13. 14 nm as (Al) content increment, whereas the dislocation density (δ) parameter decreases from 74. 96 to 57. 25, while the strain (%) decreases from 30. 01 to 26. 37. The AFM images show that the particle size (Tp) of the deposited films was in the domain of (70. 03 to 42. 54 nm) with increase doping from 1% Vol to 3% Vol. Al, average surface roughness Ra values was decreases from 6. 88-2. 22 nm. and RMS values show decreases from (7. 74 to 3. 22) nm with Aluminum doping. The transmittance spectra were recorded to calculate the optical properties using computer program. Transmittance more than 80 % was observed for all films in visible region. The energy gap Eg was decreased from (3. 39 to 3. 29) eV when Al doping increase. The Aluminum doping was enhanced the optical parameters by increasing these values.