Surface configurations during annealing of sputter-deposited NiTi thin films

Surface configurations during annealing of sputter-deposited NiTi thin films

SPUTTER-DEPOSITED NiTi thin films are becoming more and more important because of their po-tential applications to the intelligent thin-film systems. The as-deposited NiTi thin films pre-pared by magnetron sputtering are generally amorphous. Because the amorphous NiTi thinfilms cannot show shape mem...

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Veröffentlicht in:Chinese science bulletin 1997-12, Vol.42 (23), p.2019-2020
Hauptverfasser: Fengfei, Gong, Enyong, Jiang, Huimin, Shen, Yening, Wang
Format: Artikel
Sprache:eng
Schlagworte:
Thin films
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Zusammenfassung:SPUTTER-DEPOSITED NiTi thin films are becoming more and more important because of their po-tential applications to the intelligent thin-film systems. The as-deposited NiTi thin films pre-pared by magnetron sputtering are generally amorphous. Because the amorphous NiTi thinfilms cannot show shape memory effect, they should be crystallized under appropriate anneal-
ISSN:1001-6538
2095-9273
1861-9541
2095-9281
DOI:10.1007/BF02883211