Growth and Luminescent Properties of the Regular Structure of ZnO Microcrystals on Si Substrates with Whiskers

A method for creating regular semiconductor microstructures on silicon substrates with a whisker array using the vapor–liquid–solid synthesis has been demonstrated for the first time by the example of ZnO microcrystals. It is shown that a single ZnO microcrystal is formed at the top of each whisker, thereby providing the formation of a structure with a periodicity of Si whiskers. The weak dependence of the photoluminescent properties on the distance of sample zones from the zinc source during the synthesis, along with the electron microscopy data, confirmed the high degree of homogeneity of the sample.