Experimental study on the reliability and the precision maintenance of the ultra-precision grinding machine based on the key subsystem platforms

The development of high-reliability, high-precision large-scale CNC ultra-precision grinding machines is essential for the efficient processing and manufacturing of large-diameter optical components. In this paper, we studied the reliability and the precision-maintenance of the ultra-precision grinding machine tool experimentally. First, the subsystems with poor performance were identified based on former operating data, which turned out to be the hydrostatic spindle subsystem and the feed subsystem. Then, we set up specific experimental platforms for these two subsystems to study the thermal deformation and thermal characteristics. The temperature difference between the inflow and outflow oils of the hydrostatic systems is used as the key parameter to model the accuracy evolution. Our results may provide a method to reveal the relationship between the thermal characteristics and the operating parameters of the subsystems, and therefore compensate the thermal error of the whole ultra-precision grinding machine.