Oxidation behaviour and mechanical properties of sputter-deposited TMSi2 coatings (TM = Mo, Ta, Nb)
Transition-metal disilicides (TMSi2) based thin films are suggested as promising, novel protective coating materials used in various high-temperature applications. In this study, we investigate the phase formation, microstructure, and mechanical properties (i.e. H, E, and KIC) of sputter-deposited T...
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Veröffentlicht in: | Journal of alloys and compounds 2023-01, Vol.931, p.167532, Article 167532 |
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Hauptverfasser: | , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Transition-metal disilicides (TMSi2) based thin films are suggested as promising, novel protective coating materials used in various high-temperature applications. In this study, we investigate the phase formation, microstructure, and mechanical properties (i.e. H, E, and KIC) of sputter-deposited TMSix films (TM = Mo, Ta, Nb) in correlation with the varied bias potential. The as-deposited TaSix and MoSix coatings show Si sub-stoichiometries with Si/Me (x) |
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ISSN: | 0925-8388 1873-4669 |
DOI: | 10.1016/j.jallcom.2022.167532 |