Oxidation behaviour and mechanical properties of sputter-deposited TMSi2 coatings (TM = Mo, Ta, Nb)

Transition-metal disilicides (TMSi2) based thin films are suggested as promising, novel protective coating materials used in various high-temperature applications. In this study, we investigate the phase formation, microstructure, and mechanical properties (i.e. H, E, and KIC) of sputter-deposited T...

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Veröffentlicht in:Journal of alloys and compounds 2023-01, Vol.931, p.167532, Article 167532
Hauptverfasser: Bahr, A., Richter, S., Hahn, R., Wojcik, T., Podsednik, M., Limbeck, A., Ramm, J., Hunold, O., Kolozsvári, S., Riedl, H.
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Sprache:eng
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Zusammenfassung:Transition-metal disilicides (TMSi2) based thin films are suggested as promising, novel protective coating materials used in various high-temperature applications. In this study, we investigate the phase formation, microstructure, and mechanical properties (i.e. H, E, and KIC) of sputter-deposited TMSix films (TM = Mo, Ta, Nb) in correlation with the varied bias potential. The as-deposited TaSix and MoSix coatings show Si sub-stoichiometries with Si/Me (x)
ISSN:0925-8388
1873-4669
DOI:10.1016/j.jallcom.2022.167532