Methods for Estimating Plasma Density in a Large-volume Hollow Anode

The results of investigation of a low-pressure glow discharge with a hollow cathode and a large-volume hollow anode in argon and nitrogen are presented. The data on plasma density and electron temperature are obtained. A model is proposed, which describes the mechanisms of plasma sustainment in a hollow anode. The model includes the non-uniformity of plasma density distribution in the anode cavity. The estimations of the plasma parameters are made. The model is in a good agreement with the experimental data.