Laser Plasma-Chemical Etching of Polycrystalline Diamond and Single-Crystal Sapphire

Laser Plasma-Chemical Etching of Polycrystalline Diamond and Single-Crystal Sapphire

This paper presents the results of experiments on the laser plasma-chemical etching of diamond and sapphire in relation to the technological process of separating wafers into crystals with electronic devices formed on their surface with the topological design nanonorms.

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Veröffentlicht in:Russian microelectronics 2022-12, Vol.51 (6), p.435-438
Hauptverfasser: Red’kin, S. V., Mal’tsev, P. P., Kondratenko, V. S., Yuzeeva, N. A.
Format: Artikel
Sprache:eng
Schlagworte:
Chemical etching
Electrical Engineering
Electronic devices
Engineering
Laser plasmas
Polycrystalline diamond
Sapphire
Single crystals
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Beschreibung
Zusammenfassung:This paper presents the results of experiments on the laser plasma-chemical etching of diamond and sapphire in relation to the technological process of separating wafers into crystals with electronic devices formed on their surface with the topological design nanonorms.
ISSN:1063-7397
1608-3415
DOI:10.1134/S1063739722050067