Plasma Potential Measurement in Detached Plasmas by Emissive Probe Considering Space-Charge-Limited Effect

The accuracy for the measurement of the plasma potential was improved using an emissive probe (EP) considering the space-charge-limited (SCL) effect. To validate the measurement method, the plasma potential measured using a method combining double probe (DP) and single probe (SP) was compared to the developed method. The two measurement methods showed a good agreement: it was confirmed that the EP considering the SCL effect was able to measure the plasma potential accurately even in detached plasmas with a high-temporal-resolution.