International Standardization of S-SIMS Quantitative Analysis of Binary Organic Mixtures with Relative Sensitivity Factor Method

Ex-Japan Research Industry and Industrial Technology Associates, JRIA, conducted a series of research on the matrix effect of static secondary-ion mass spectrometry, S-SIMS. In the course of the research, we found that the binary organic mixture which consists of 3,3-Di(9H-carbazol-9-yl)biphenyl, mCBP, and tri-(2-phenylpyridine)iridium, Ir(ppy)3, can be determined mole fraction by S-SIMS, with relative sensitivity factor method, RSF method. Based on the research, Ion beam working group of Japan National Committee for Standardization of Surface Chemical Analysis, JSCA, decided to propose the quantitative analysis method for a binary organic mixture using S-SIMS. International Standard Organization Technical Committee Sub Committee 6, IOS/TC201/SC 6 has resolved to develop the standard of it. In this paper, we review the difficulties of SIMS quantification analysis and matrix effect and outline the JRIA research. We then introduce the draft of the quantification method and diagnostic method of testing whether the molecule can be quantified. We also explain how this draft is to be positioned in the SIMS’s ISO.