Investigation of the Properties of Transparent Conductive Oxides Produced by Aerosol Pyrolysis

Transparent conducting thin-film oxides have found wide practical application in various devices of optoelectronic and semiconductor technology. The article is devoted to studying the morphological and structural characteristics, and the electrical and optical properties of a transparent conductive oxide. Thin films of tin dioxide are obtained by the pyrolysis of aerosols on glass substrates. It is shown that SnO 2 has a tetragonal crystal structure. Analysis of the morphology shows that the grain size in the film increases with a change in the deposition temperature from 450 to 550°C. Studying the optical properties of a transparent conducting oxide results in the dependence of the transmittance on the volume of the solution and the transmittance of the obtained samples on doping levels. The transmittance is almost independent of the amount of substance sprayed onto the substrate. However, the chemical composition of the films has a great influence on the transmittance. The main electrical parameter that affects the quality of transparent conductive oxides is conductivity or surface resistance. The surface resistance is measured by probe methods, the most accurate of which is the Van der Pauw (VDP) method. The resistance of the surface region decreases with an increase in the solution volume, as well as with an increase in the precursor and impurity concentrations.