Novel Built-In Test Equipment for Phase Measurement in Millimeter-Wave Phased Arrays Integrated Circuits With Absolute Phase Measurement Capabilities

This article presents a novel built-in test equipment (BITE) for phase measurements in millimeter-wave integrated circuits (ICs). The BITE targets 5G New Radio (NR) applications. It is able to measure the phase in good agreement with \mathbf {S_{21}} measurements and has a relative rms phase error lower than 6° over the frequency band of interest. Aside from the relative phase, this BITE also addresses the absolute phase difference of all ICs on the same phased array. To the authors' best knowledge, this is the first BITE and built-in self-test (BIST) to do so. The BITE is able to reduce the absolute phase discrepancy by a factor of 3. To reduce the measurement complexity, the BITE is implemented as a homodyne architecture to output a dc voltage relative to the phase of the channel. A built-in algorithm is used, mitigating the impairments normally associated with a homodyne receiver. This reduces the design complexity and hence the area overhead. The BITE occupies an area of 480 \mathbf {\mu m} \times 135\,\,\mathbf {\mu m} , facilitating easy integration.