P‐4.5: TFT characteristic improvement of amorphous silicon by Design of Experiments

Electrical defects are the common types of Problems in TFT‐LCD, Such as Vertical Cross Talk (short for V‐CT), Low temperature startup, etc. The issue's severity is directly related to the thin film transistor (short for TFT) characteristic which contain On‐State Current(Ion), off‐state current(Ioff), etc. In order to optimize the product performance and improve the process margin, the influence of different parameters of active layer on TFT characteristics was researched by a series of Design of Experiments (DOE).