Modeling of Thermogasdynamics and Thermal Processes of Volatile Halides of Elements of III, IV and VI Groups in Thermal Plasma of RF-IC Discharge at Atmospheric Pressure
A mathematical model has been proposed and verified, based on the combination of thermodynamic calculations of equilibrium plasma and CFD-modeling of the plasma-chemical reactor for hydrogen recovery of volatile halides. An experimental study of the hydrogen reduction processes of BCl 3 and SiCl 4 w...
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| Veröffentlicht in: | Plasma chemistry and plasma processing 2022-11, Vol.42 (6), p.1381-1403 |
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| container_title | Plasma chemistry and plasma processing |
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| creator | Shabarova, L. V. Kornev, R. A. Ermakov, A. A. Shkrunin, V. E. Shishkin, A. I. Belov, A. A. Kalyasov, P. S. |
| description | A mathematical model has been proposed and verified, based on the combination of thermodynamic calculations of equilibrium plasma and CFD-modeling of the plasma-chemical reactor for hydrogen recovery of volatile halides. An experimental study of the hydrogen reduction processes of BCl
3
and SiCl
4
was carried out under conditions of RF-IC (RF inductively coupled) discharge at atmospheric pressure. Based on the experimental results, the developed mathematical model was validated. A series of numerical experiments on parametric study of gas dynamics of high-frequency plasmatron with vortex stabilization of flow for various hydrogen concentrations in argon-hydrogen plasma-forming mixture was carried out. Thermodynamic calculations and CFD modeling were made for input into the reaction chamber of chemically active gas mixtures (BCl
3
+ H
2
), (BF
3
+ H
2
), (SiCl
4
+ H
2
), (SiF
4
+ H
2
), (MoF
6
+ H
2
), (WF
6
+ H
2
), (BCl
3
+ CH
4
+ H
2
), (BF
3
+ CH
4
+ H
2
), (SiF
4
+ CH
4
+ H
2
), (MoF
6
+ CH
4
+ H
2
) and (WF
6
+ CH
4
+ H
2
). The values for the predictive efficiency and the degree of conversion of target products were obtained. |
| doi_str_mv | 10.1007/s11090-022-10276-w |
| format | Article |
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3
and SiCl
4
was carried out under conditions of RF-IC (RF inductively coupled) discharge at atmospheric pressure. Based on the experimental results, the developed mathematical model was validated. A series of numerical experiments on parametric study of gas dynamics of high-frequency plasmatron with vortex stabilization of flow for various hydrogen concentrations in argon-hydrogen plasma-forming mixture was carried out. Thermodynamic calculations and CFD modeling were made for input into the reaction chamber of chemically active gas mixtures (BCl
3
+ H
2
), (BF
3
+ H
2
), (SiCl
4
+ H
2
), (SiF
4
+ H
2
), (MoF
6
+ H
2
), (WF
6
+ H
2
), (BCl
3
+ CH
4
+ H
2
), (BF
3
+ CH
4
+ H
2
), (SiF
4
+ CH
4
+ H
2
), (MoF
6
+ CH
4
+ H
2
) and (WF
6
+ CH
4
+ H
2
). The values for the predictive efficiency and the degree of conversion of target products were obtained.</description><identifier>ISSN: 0272-4324</identifier><identifier>EISSN: 1572-8986</identifier><identifier>DOI: 10.1007/s11090-022-10276-w</identifier><language>eng</language><publisher>New York: Springer US</publisher><subject>Argon ; Atmospheric pressure ; Boron chlorides ; Characterization and Evaluation of Materials ; Chemical reactors ; Chemistry ; Chemistry and Materials Science ; Classical Mechanics ; Discharge ; Gas dynamics ; Gas mixtures ; Halides ; Hydrogen ; Hydrogen plasma ; Hydrogen reduction ; Inorganic Chemistry ; Mathematical analysis ; Mathematical models ; Mechanical Engineering ; Methane ; Original Paper ; Plasma ; Silicon tetrachloride ; Thermal plasmas ; Thermodynamic equilibrium ; Thermodynamics</subject><ispartof>Plasma chemistry and plasma processing, 2022-11, Vol.42 (6), p.1381-1403</ispartof><rights>The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c270t-3dfae5657a7c10f85ce2ae73d3c1f266f8c9b3cad97ccd687c49f5a354b59f673</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s11090-022-10276-w$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s11090-022-10276-w$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,41488,42557,51319</link.rule.ids></links><search><creatorcontrib>Shabarova, L. V.</creatorcontrib><creatorcontrib>Kornev, R. A.</creatorcontrib><creatorcontrib>Ermakov, A. A.</creatorcontrib><creatorcontrib>Shkrunin, V. E.</creatorcontrib><creatorcontrib>Shishkin, A. I.</creatorcontrib><creatorcontrib>Belov, A. A.</creatorcontrib><creatorcontrib>Kalyasov, P. S.</creatorcontrib><title>Modeling of Thermogasdynamics and Thermal Processes of Volatile Halides of Elements of III, IV and VI Groups in Thermal Plasma of RF-IC Discharge at Atmospheric Pressure</title><title>Plasma chemistry and plasma processing</title><addtitle>Plasma Chem Plasma Process</addtitle><description>A mathematical model has been proposed and verified, based on the combination of thermodynamic calculations of equilibrium plasma and CFD-modeling of the plasma-chemical reactor for hydrogen recovery of volatile halides. An experimental study of the hydrogen reduction processes of BCl
3
and SiCl
4
was carried out under conditions of RF-IC (RF inductively coupled) discharge at atmospheric pressure. Based on the experimental results, the developed mathematical model was validated. A series of numerical experiments on parametric study of gas dynamics of high-frequency plasmatron with vortex stabilization of flow for various hydrogen concentrations in argon-hydrogen plasma-forming mixture was carried out. Thermodynamic calculations and CFD modeling were made for input into the reaction chamber of chemically active gas mixtures (BCl
3
+ H
2
), (BF
3
+ H
2
), (SiCl
4
+ H
2
), (SiF
4
+ H
2
), (MoF
6
+ H
2
), (WF
6
+ H
2
), (BCl
3
+ CH
4
+ H
2
), (BF
3
+ CH
4
+ H
2
), (SiF
4
+ CH
4
+ H
2
), (MoF
6
+ CH
4
+ H
2
) and (WF
6
+ CH
4
+ H
2
). The values for the predictive efficiency and the degree of conversion of target products were obtained.</description><subject>Argon</subject><subject>Atmospheric pressure</subject><subject>Boron chlorides</subject><subject>Characterization and Evaluation of Materials</subject><subject>Chemical reactors</subject><subject>Chemistry</subject><subject>Chemistry and Materials Science</subject><subject>Classical Mechanics</subject><subject>Discharge</subject><subject>Gas dynamics</subject><subject>Gas mixtures</subject><subject>Halides</subject><subject>Hydrogen</subject><subject>Hydrogen plasma</subject><subject>Hydrogen reduction</subject><subject>Inorganic Chemistry</subject><subject>Mathematical analysis</subject><subject>Mathematical models</subject><subject>Mechanical Engineering</subject><subject>Methane</subject><subject>Original Paper</subject><subject>Plasma</subject><subject>Silicon tetrachloride</subject><subject>Thermal plasmas</subject><subject>Thermodynamic equilibrium</subject><subject>Thermodynamics</subject><issn>0272-4324</issn><issn>1572-8986</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><recordid>eNp9kV9r2zAUxUXpoGm2L7AnwV6nTX9sy34sWdIaOjZKmldxK0upi21lug4hH6nfcko8yNueJA6_cw7cQ8hnwb8JzvV3FIJXnHEpmeBSF-xwRWYi15KVVVlck1kSJcuUzG7ILeIb58mm9Iy8_wyN69phS4On61cX-7AFbI4D9K1FCkMzqdDR3zFYh-jwhG5CB2PbOfoAXdtM2rJzvRvG87-u66-03pwDNjW9j2G_Q9oOl7QOsIcT-rRi9YL-aNG-Qtw6CiO9G_uAu0S2NtWm0n10H8kHDx26T__eOXleLdeLB_b4675e3D0yKzUfmWo8uLzINWgruC9z6yQ4rRplhZdF4UtbvSgLTaWtbYpS26zyOag8e8krX2g1J1-m3F0Mf_YOR_MW9nFIlSbdUJWZUpVIlJwoGwNidN7sYttDPBrBzWkSM01i0iTmPIk5JJOaTJjgYeviJfo_rr9uRZC2</recordid><startdate>20221101</startdate><enddate>20221101</enddate><creator>Shabarova, L. V.</creator><creator>Kornev, R. A.</creator><creator>Ermakov, A. A.</creator><creator>Shkrunin, V. E.</creator><creator>Shishkin, A. I.</creator><creator>Belov, A. A.</creator><creator>Kalyasov, P. S.</creator><general>Springer US</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20221101</creationdate><title>Modeling of Thermogasdynamics and Thermal Processes of Volatile Halides of Elements of III, IV and VI Groups in Thermal Plasma of RF-IC Discharge at Atmospheric Pressure</title><author>Shabarova, L. V. ; Kornev, R. A. ; Ermakov, A. A. ; Shkrunin, V. E. ; Shishkin, A. I. ; Belov, A. A. ; Kalyasov, P. S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c270t-3dfae5657a7c10f85ce2ae73d3c1f266f8c9b3cad97ccd687c49f5a354b59f673</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>Argon</topic><topic>Atmospheric pressure</topic><topic>Boron chlorides</topic><topic>Characterization and Evaluation of Materials</topic><topic>Chemical reactors</topic><topic>Chemistry</topic><topic>Chemistry and Materials Science</topic><topic>Classical Mechanics</topic><topic>Discharge</topic><topic>Gas dynamics</topic><topic>Gas mixtures</topic><topic>Halides</topic><topic>Hydrogen</topic><topic>Hydrogen plasma</topic><topic>Hydrogen reduction</topic><topic>Inorganic Chemistry</topic><topic>Mathematical analysis</topic><topic>Mathematical models</topic><topic>Mechanical Engineering</topic><topic>Methane</topic><topic>Original Paper</topic><topic>Plasma</topic><topic>Silicon tetrachloride</topic><topic>Thermal plasmas</topic><topic>Thermodynamic equilibrium</topic><topic>Thermodynamics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Shabarova, L. V.</creatorcontrib><creatorcontrib>Kornev, R. A.</creatorcontrib><creatorcontrib>Ermakov, A. A.</creatorcontrib><creatorcontrib>Shkrunin, V. E.</creatorcontrib><creatorcontrib>Shishkin, A. I.</creatorcontrib><creatorcontrib>Belov, A. A.</creatorcontrib><creatorcontrib>Kalyasov, P. S.</creatorcontrib><collection>CrossRef</collection><jtitle>Plasma chemistry and plasma processing</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Shabarova, L. V.</au><au>Kornev, R. A.</au><au>Ermakov, A. A.</au><au>Shkrunin, V. E.</au><au>Shishkin, A. I.</au><au>Belov, A. A.</au><au>Kalyasov, P. S.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Modeling of Thermogasdynamics and Thermal Processes of Volatile Halides of Elements of III, IV and VI Groups in Thermal Plasma of RF-IC Discharge at Atmospheric Pressure</atitle><jtitle>Plasma chemistry and plasma processing</jtitle><stitle>Plasma Chem Plasma Process</stitle><date>2022-11-01</date><risdate>2022</risdate><volume>42</volume><issue>6</issue><spage>1381</spage><epage>1403</epage><pages>1381-1403</pages><issn>0272-4324</issn><eissn>1572-8986</eissn><abstract>A mathematical model has been proposed and verified, based on the combination of thermodynamic calculations of equilibrium plasma and CFD-modeling of the plasma-chemical reactor for hydrogen recovery of volatile halides. An experimental study of the hydrogen reduction processes of BCl
3
and SiCl
4
was carried out under conditions of RF-IC (RF inductively coupled) discharge at atmospheric pressure. Based on the experimental results, the developed mathematical model was validated. A series of numerical experiments on parametric study of gas dynamics of high-frequency plasmatron with vortex stabilization of flow for various hydrogen concentrations in argon-hydrogen plasma-forming mixture was carried out. Thermodynamic calculations and CFD modeling were made for input into the reaction chamber of chemically active gas mixtures (BCl
3
+ H
2
), (BF
3
+ H
2
), (SiCl
4
+ H
2
), (SiF
4
+ H
2
), (MoF
6
+ H
2
), (WF
6
+ H
2
), (BCl
3
+ CH
4
+ H
2
), (BF
3
+ CH
4
+ H
2
), (SiF
4
+ CH
4
+ H
2
), (MoF
6
+ CH
4
+ H
2
) and (WF
6
+ CH
4
+ H
2
). The values for the predictive efficiency and the degree of conversion of target products were obtained.</abstract><cop>New York</cop><pub>Springer US</pub><doi>10.1007/s11090-022-10276-w</doi><tpages>23</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0272-4324 |
| ispartof | Plasma chemistry and plasma processing, 2022-11, Vol.42 (6), p.1381-1403 |
| issn | 0272-4324 1572-8986 |
| language | eng |
| recordid | cdi_proquest_journals_2723843391 |
| source | SpringerNature Journals |
| subjects | Argon Atmospheric pressure Boron chlorides Characterization and Evaluation of Materials Chemical reactors Chemistry Chemistry and Materials Science Classical Mechanics Discharge Gas dynamics Gas mixtures Halides Hydrogen Hydrogen plasma Hydrogen reduction Inorganic Chemistry Mathematical analysis Mathematical models Mechanical Engineering Methane Original Paper Plasma Silicon tetrachloride Thermal plasmas Thermodynamic equilibrium Thermodynamics |
| title | Modeling of Thermogasdynamics and Thermal Processes of Volatile Halides of Elements of III, IV and VI Groups in Thermal Plasma of RF-IC Discharge at Atmospheric Pressure |
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