Modeling of Thermogasdynamics and Thermal Processes of Volatile Halides of Elements of III, IV and VI Groups in Thermal Plasma of RF-IC Discharge at Atmospheric Pressure

A mathematical model has been proposed and verified, based on the combination of thermodynamic calculations of equilibrium plasma and CFD-modeling of the plasma-chemical reactor for hydrogen recovery of volatile halides. An experimental study of the hydrogen reduction processes of BCl 3 and SiCl 4 was carried out under conditions of RF-IC (RF inductively coupled) discharge at atmospheric pressure. Based on the experimental results, the developed mathematical model was validated. A series of numerical experiments on parametric study of gas dynamics of high-frequency plasmatron with vortex stabilization of flow for various hydrogen concentrations in argon-hydrogen plasma-forming mixture was carried out. Thermodynamic calculations and CFD modeling were made for input into the reaction chamber of chemically active gas mixtures (BCl 3 + H 2 ), (BF 3 + H 2 ), (SiCl 4 + H 2 ), (SiF 4 + H 2 ), (MoF 6 + H 2 ), (WF 6 + H 2 ), (BCl 3 + CH 4 + H 2 ), (BF 3 + CH 4 + H 2 ), (SiF 4 + CH 4 + H 2 ), (MoF 6 + CH 4 + H 2 ) and (WF 6 + CH 4 + H 2 ). The values for the predictive efficiency and the degree of conversion of target products were obtained.