Preparation of highly ionic conductive lithium phosphorus oxynitride electrolyte particles using the polygonal barrel-plasma treatment method

Herein, lithium phosphorus oxynitride (LiPON) electrolyte particles with high ionic conductivity were prepared using the polygonal barrel-plasma treatment method. Results showed that the ionic conductivity of Li3PO4 (particle size: 77 nm) was improved via the N2-plasma treatment (treatment time: 60–...

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Veröffentlicht in:	Journal of alloys and compounds 2022-11, Vol.923, p.166350, Article 166350
Hauptverfasser:	Inoue, Mitsuhiro, Iwane, Hiroaki, Kikuyama, Hideshi, Tasaki, Yuzo, Honda, Yuji, Abe, Takayuki
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous LiPON electrolyte particles Bulk-type all-solid-state lithium-ion battery Crystallization Dry process Electrolytes Ion currents Ionic conductivity Ions Lithium Nitrogen plasma Oxynitrides Particle size Phosphorus Photoelectrons Plasma Polygonal barrel-plasma treatment system Polygons Room temperature Thickness Time dependence
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Zusammenfassung:	Herein, lithium phosphorus oxynitride (LiPON) electrolyte particles with high ionic conductivity were prepared using the polygonal barrel-plasma treatment method. Results showed that the ionic conductivity of Li3PO4 (particle size: 77 nm) was improved via the N2-plasma treatment (treatment time: 60–180 min). The maximum ionic conductivity (8.8 × 10–6 S cm–1 at room temperature) was obtained for a treatment time of 90 min, and it approximates that of amorphous LiPON films in literature. X-ray photoelectron spectroscopy of the treated samples (particle size: 29 µm) revealed the formation of LiPON: the area ratio of triply coordinated nitrogen (P–N
ISSN:	0925-8388 1873-4669
DOI:	10.1016/j.jallcom.2022.166350