Resistive Switching Behaviors of a Cu/MnO2/FTO Device Under Different Annealing Temperatures

A Cu/MnO 2 /SnO 2 conductive glass doped with a fluorine (referred to as FTO) interlayer sandwich structure resistive switching memory device was prepared by radio-frequency magnetron sputtering and vacuum evaporation. The prepared Cu/MnO 2 /FTO device shows nonvolatile bipolar resistive switching b...

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Veröffentlicht in:Journal of electronic materials 2022-11, Vol.51 (11), p.6547-6555
Hauptverfasser: Ai, Ruibo, Zhang, Tao, Guo, Huijie, Luo, Wang, Liu, Xiaojun
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creator Ai, Ruibo
Zhang, Tao
Guo, Huijie
Luo, Wang
Liu, Xiaojun
description A Cu/MnO 2 /SnO 2 conductive glass doped with a fluorine (referred to as FTO) interlayer sandwich structure resistive switching memory device was prepared by radio-frequency magnetron sputtering and vacuum evaporation. The prepared Cu/MnO 2 /FTO device shows nonvolatile bipolar resistive switching behavior. The effect of annealing temperature on resistance switch characteristics was studied. The experimental results show that the resistive switching behavior of MnO 2 films is affected by annealing temperature; in particular, after annealing at 700 K, the resistive switching performance is more stable. The carrier conduction behavior of the high-resistance state and low-resistance state has been studied. The resistive switching behavior of Cu/MnO 2 /FTO devices is analyzed in the terms of formation and dissipation of filaments under an electric field of an oxygen vacancy conductive path combined with Cu conductive filaments.
doi_str_mv 10.1007/s11664-022-09896-x
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The prepared Cu/MnO 2 /FTO device shows nonvolatile bipolar resistive switching behavior. The effect of annealing temperature on resistance switch characteristics was studied. The experimental results show that the resistive switching behavior of MnO 2 films is affected by annealing temperature; in particular, after annealing at 700 K, the resistive switching performance is more stable. The carrier conduction behavior of the high-resistance state and low-resistance state has been studied. 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subjects Annealing
Behavior
Characterization and Evaluation of Materials
Chemistry and Materials Science
Electric fields
Electrodes
Electronics and Microelectronics
Filaments
Fluorine
Glass substrates
Instrumentation
Interlayers
Magnetron sputtering
Manganese dioxide
Materials Science
Memory devices
Metal oxides
Optical and Electronic Materials
Original Research Article
Random access memory
Sandwich structures
Solid State Physics
Switching
Temperature
Tin dioxide
Vacuum evaporation
title Resistive Switching Behaviors of a Cu/MnO2/FTO Device Under Different Annealing Temperatures
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