Discharge KrF Laser with a High Specific Energy of Radiation

We report the results of experimental and numerical investigations of a discharge KrF laser with specific pump power of 3.5 and 7 MW/cm 3 ; generation is obtained with specific radiation pulse energy of about 6 and 9.5 J/L for an internal energy efficiency of about 4%. Time dependences of the formation of charged and excited particles in a dense excimer plasma with an electron concentration of ~10 16 cm –3 are obtained. The conditions for effective operation of the laser are proposed, which will ensure a further increase in the specific radiation energy by more than two times with preserved high internal laser efficiency relative to the energy input into the discharge.