High-quality YIG films preparation by metallo-organic decomposition and their use to fabricate spintronics nanostructures by focused ion beam

High-quality single-phase YIG films prepared by metallo-organic decomposition (MOD) and suitable for the fabrication of ordered nanostructures using a focused ion beam are presented in this work. The YIG films were deposited both on Si and SiO 2 substrates and the cleaning process of the substrate was evaluated as a parameter influencing the film homogeneity. X-ray diffraction and Raman spectroscopy data revealed that a single YIG resulted in all experiments. SEM and AFM showed that films are crack-free with porous morphology and the roughness is smaller than Rq