Facet-dependent electrical conductivity properties of a 4H-SiC wafer

Intrinsic {0001} 4H-SiC wafer cut to expose {101&cmb.macr;0} and {12&cmb.macr;10} side faces allows for conductivity measurements on different crystal surfaces. The wafer has a band gap of 3.20 eV. Its {0001} face gives a strong emission band at 384 nm, but the {101&cmb.macr;0} face is b...

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Veröffentlicht in:Journal of materials chemistry. C, Materials for optical and electronic devices Materials for optical and electronic devices, 2022-07, Vol.1 (28), p.1424-1428
Hauptverfasser: Kumar, Gautam, Chen, Jing-Wei, Ma, Hsueh-Heng, Huang, Xing-Fu, Huang, Michael H
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Sprache:eng
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Zusammenfassung:Intrinsic {0001} 4H-SiC wafer cut to expose {101&cmb.macr;0} and {12&cmb.macr;10} side faces allows for conductivity measurements on different crystal surfaces. The wafer has a band gap of 3.20 eV. Its {0001} face gives a strong emission band at 384 nm, but the {101&cmb.macr;0} face is barely emissive. The {0001} face is also highly electrically conductive. The {101&cmb.macr;0} and {12&cmb.macr;10} faces show similar but comparatively less conductivity than the {0001} face. Clean current-rectifying I - V curves are obtained for the {0001}/{101&cmb.macr;0} facet combination, so novel transistors can be fabricated using the electrical facet effect. Moreover, the SiC wafer displays clear photoconductivity properties. Electrical conductivity of a 4H-SiC wafer is facet-dependent with its {0001} face being much more conductive than its {101&cmb.macr;0} face, and it presents a perfect current rectification effect.
ISSN:2050-7526
2050-7534
DOI:10.1039/d2tc01981g