P‐28: Development of Low‐Resistivity Gate‐Metal Process for LTPS‐TFT‐Array Backplane Applications

We fabricated and characterized Low‐Temperature Polycrystalline‐Silicon Thin‐Film Transistors (LTPS TFTs) with low resistivity gate metal on a glass substrate, which can be applied to high refresh driving products. And the technology has been integrated to a gaming‐laptops liquid crystal display and...

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Veröffentlicht in:	SID International Symposium Digest of technical papers 2022-06, Vol.53 (1), p.1141-1144
Hauptverfasser:	Ye, Jia-Hong, Huang, Ching-Liang, Huang, Kuo-Yu, Chen, Maw-Song, Guo, Wen-Rei, Huang, Wei-Ming, Wu, Yang-An
Format:	Artikel
Sprache:	eng
Schlagworte:	Backplanes Electrical resistivity Glass substrates high frame rate driving Liquid crystal displays low resistivity metal LTPS TFTs Semiconductor devices Thin film transistors
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Beschreibung
Zusammenfassung:	We fabricated and characterized Low‐Temperature Polycrystalline‐Silicon Thin‐Film Transistors (LTPS TFTs) with low resistivity gate metal on a glass substrate, which can be applied to high refresh driving products. And the technology has been integrated to a gaming‐laptops liquid crystal display and demonstrated. This new LTPS TFTs backplane technology is promising integration for various displays, such as current driving like displays and LCD display.
ISSN:	0097-966X 2168-0159
DOI:	10.1002/sdtp.15703