4‐2: Student Paper: High‐Performance, Coplanar Polycrystalline InGaO Thin‐Film Transistor for Large‐Area, High‐Resolution AMOLED Display

4‐2: Student Paper: High‐Performance, Coplanar Polycrystalline InGaO Thin‐Film Transistor for Large‐Area, High‐Resolution AMOLED Display

We report a very simple hotplate crystallization technique to achieve the polycrystalline InGaO (IGO) thin films at low temperature (

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Veröffentlicht in:SID International Symposium Digest of technical papers 2022-06, Vol.53 (1), p.16-19
Hauptverfasser: Rabbi, Md. Hasnat, Lee, Suhui, Sasaki, Daich, Kawashima, Emi, Tsuruma, Yuki, Jang, Jin
Format: Artikel
Sprache:eng
Schlagworte:
Active matrix displays
Backplanes
coplanar TFT
Crystallization
high mobility and high stability
InGaO
Low temperature
Polycrystalline oxide
Polycrystals
Semiconductor devices
Thin film transistors
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Zusammenfassung:We report a very simple hotplate crystallization technique to achieve the polycrystalline InGaO (IGO) thin films at low temperature (
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.15404