69‐4: Collimating and Recycling Linear Evaporation Source for AMOLED Mass Production

69‐4: Collimating and Recycling Linear Evaporation Source for AMOLED Mass Production

It is important in AMOLED pixel forming process to reduce low angle region flux of particles emitted from thermal evaporation source. Because it can cause the mask shadow effect, nozzle clogging and material waste. We developed Collimating and Recycling source. It has unique nozzle structure that ca...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2022-06, Vol.53 (1), p.933-936
Hauptverfasser: Kim, Sungmoon, Chi, Daejoon, Lee, Taekgi, Ko, Gyoung O
Format: Artikel
Sprache:eng
Schlagworte:
AMOLED
Collimated flux
Collimation
Evaporation
Mask shadow effect
Mass production
Material recycling
Nozzle clogging
Nozzles
Recycling
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Beschreibung
Zusammenfassung:It is important in AMOLED pixel forming process to reduce low angle region flux of particles emitted from thermal evaporation source. Because it can cause the mask shadow effect, nozzle clogging and material waste. We developed Collimating and Recycling source. It has unique nozzle structure that can make low angle flux go down to recycling basket and pass only high angle flux through final nozzle. It can make collimating flux that is similar with cosine to the tenth. And it can recycle material 70%.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.15648