Design of Micropump with two stacked ring type piezoelectric actuators for drug delivery

The Micropump has many applications in the field of microfluidics systems where it has to handle a very small volume of fluids in a controlled manner. Applications include drug delivery and healthcare systems (Monitoring and diagnostic), microelectronic cooling devices, and many more. The main objective of this paper is to design a micropump for drug delivery applications with two Stacked ring type piezoelectric actuators (SPZT) for having a better flow rate with a low operating voltage of 90 V P-P . The Use of ring type actuator decreases the area of contact between actuator and membrane which has to be glued. A study is performed on membrane displacement by varying the inner radius of ring type SPZT actuator. The Actuator used here is the Stacked (multilayered) type which offers more strain at low voltages. All parametric study is performed using FEM numerical analysis. The proposed micropump design given a flow rate of 800(μl/min) at an operation frequency of 100 Hz.