Impact of substrate heating during Al deposition and post annealing on surface morphology, Al crystallinity, and Ge segregation in Al/Ge(111) structure

We have studied the impact of Ge substrate heating during ∼25 nm thick Al deposition and post annealing in N 2 ambient on the surface flatness of an Al/Ge(111) structure, the crystallographic structure of the deposited Al layer, and formation of a Ge segregated layer. Surface segregation of Ge atoms...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2022-07, Vol.61 (SH), p.SH1012
Hauptverfasser:	Matsushita, Keigo, Ohta, Akio, Taoka, Noriyuki, Hayashi, Shohei, Makihara, Katsunori, Miyazaki, Seiichi
Format:	Artikel
Sprache:	eng
Schlagworte:	2D material Annealing Crystal growth Crystal structure Crystallinity Crystallography Deposition Germanium Heating Metal surfaces Morphology segregation Substrates
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