Impact of substrate heating during Al deposition and post annealing on surface morphology, Al crystallinity, and Ge segregation in Al/Ge(111) structure

We have studied the impact of Ge substrate heating during ∼25 nm thick Al deposition and post annealing in N 2 ambient on the surface flatness of an Al/Ge(111) structure, the crystallographic structure of the deposited Al layer, and formation of a Ge segregated layer. Surface segregation of Ge atoms...

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Veröffentlicht in:Japanese Journal of Applied Physics 2022-07, Vol.61 (SH), p.SH1012
Hauptverfasser: Matsushita, Keigo, Ohta, Akio, Taoka, Noriyuki, Hayashi, Shohei, Makihara, Katsunori, Miyazaki, Seiichi
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Sprache:eng
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Zusammenfassung:We have studied the impact of Ge substrate heating during ∼25 nm thick Al deposition and post annealing in N 2 ambient on the surface flatness of an Al/Ge(111) structure, the crystallographic structure of the deposited Al layer, and formation of a Ge segregated layer. Surface segregation of Ge atoms on a flat metal surface is an effective means of growing two-dimensional Ge crystals as well as an ultrathin Ge crystalline layer. The surface morphology of the Al/Ge(111) structure becomes flat by substrate heating during Al deposition. The crystallinity of the Al layer on Ge(111) can be improved by both substrate heating and post annealing. Ge segregation on a flat Al(111) surface also occurred by post annealing.
ISSN:0021-4922
1347-4065
DOI:10.35848/1347-4065/ac5fbc