Impact of substrate heating during Al deposition and post annealing on surface morphology, Al crystallinity, and Ge segregation in Al/Ge(111) structure
We have studied the impact of Ge substrate heating during ∼25 nm thick Al deposition and post annealing in N 2 ambient on the surface flatness of an Al/Ge(111) structure, the crystallographic structure of the deposited Al layer, and formation of a Ge segregated layer. Surface segregation of Ge atoms...
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Veröffentlicht in: | Japanese Journal of Applied Physics 2022-07, Vol.61 (SH), p.SH1012 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We have studied the impact of Ge substrate heating during ∼25 nm thick Al deposition and post annealing in N
2
ambient on the surface flatness of an Al/Ge(111) structure, the crystallographic structure of the deposited Al layer, and formation of a Ge segregated layer. Surface segregation of Ge atoms on a flat metal surface is an effective means of growing two-dimensional Ge crystals as well as an ultrathin Ge crystalline layer. The surface morphology of the Al/Ge(111) structure becomes flat by substrate heating during Al deposition. The crystallinity of the Al layer on Ge(111) can be improved by both substrate heating and post annealing. Ge segregation on a flat Al(111) surface also occurred by post annealing. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.35848/1347-4065/ac5fbc |