UV detectors based on nanocrystalline ZnO films

Nanocrystalline films of zinc oxide deposited by rf magnetron sputtering are used as a working material of UV detectors. The photoelectric performance of UV detectors versus ZnO deposition conditions is studied. The influence of the surface topology of the UV detectors on their efficiency is examine...

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Veröffentlicht in:	Technical physics 2008-08, Vol.53 (8), p.1065-1069
Hauptverfasser:	Krivchenko, V. A., Lopaev, D. V., Pashchenko, P. V., Pirogov, V. G., Rakhimov, A. T., Suetin, N. V., Trifonov, A. S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopes Atomic force microscopy Classical and Continuum Physics Detectors Magnetron sputtering Nanocrystals Optics Photoelectricity Physics Physics and Astronomy Quantum Electronics Sensors Topology Zinc oxide Zinc oxides
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Beschreibung
Zusammenfassung:	Nanocrystalline films of zinc oxide deposited by rf magnetron sputtering are used as a working material of UV detectors. The photoelectric performance of UV detectors versus ZnO deposition conditions is studied. The influence of the surface topology of the UV detectors on their efficiency is examined with an atomic force microscope.
ISSN:	1063-7842 1090-6525
DOI:	10.1134/S1063784208080148