Oxygen incorporation in AllnP, and its effect on P-type doping with magnesium
Oxygen incorporation in AlyIn1−yP (y ∼ 0.5) grown by metalorganic chemical vapor deposition (MOCVD) has been studied as a function of PH3 flow, growth temperature, and alloy composition. Both O2 and diethylaluminum ethoxide (DEAlO) were employed as sources of oxygen. The incorporation of oxygen was...
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| Veröffentlicht in: | Journal of electronic materials 1999-07, Vol.28 (7), p.916-925 |
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| creator | Stockman, S. A. Huang, J. -W. Osentowski, T. D. Chui, H. C. Peanasky, M. J. Maranowski, S. A. Grillot, P. N. Moll, A. J. Chen, C. H. Kuo, C. P. Liang, B. W. |
| description | Oxygen incorporation in AlyIn1−yP (y ∼ 0.5) grown by metalorganic chemical vapor deposition (MOCVD) has been studied as a function of PH3 flow, growth temperature, and alloy composition. Both O2 and diethylaluminum ethoxide (DEAlO) were employed as sources of oxygen. The incorporation of oxygen was found to be a superlinear function of O2 or DEAlO flow. When multiple sources of oxygen are present, a surface interaction leads to enhanced oxygen incorporation. Oxygen incorporation cannot be adequately described by a simple dependence on growth temperature or V/III ratio due to strong interactions between these variables. In Mg-doped AlInP co-doped with oxygen, the incorporation of both Mg and O is strongly affected by an interaction between the two species, and roughly 10% of the oxygen atoms act as compensating donors. |
| doi_str_mv | 10.1007/s11664-999-0220-x |
| format | Article |
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A. ; Huang, J. -W. ; Osentowski, T. D. ; Chui, H. C. ; Peanasky, M. J. ; Maranowski, S. A. ; Grillot, P. N. ; Moll, A. J. ; Chen, C. H. ; Kuo, C. P. ; Liang, B. W.</creator><creatorcontrib>Stockman, S. A. ; Huang, J. -W. ; Osentowski, T. D. ; Chui, H. C. ; Peanasky, M. J. ; Maranowski, S. A. ; Grillot, P. N. ; Moll, A. J. ; Chen, C. H. ; Kuo, C. P. ; Liang, B. W.</creatorcontrib><description>Oxygen incorporation in AlyIn1−yP (y ∼ 0.5) grown by metalorganic chemical vapor deposition (MOCVD) has been studied as a function of PH3 flow, growth temperature, and alloy composition. Both O2 and diethylaluminum ethoxide (DEAlO) were employed as sources of oxygen. The incorporation of oxygen was found to be a superlinear function of O2 or DEAlO flow. When multiple sources of oxygen are present, a surface interaction leads to enhanced oxygen incorporation. Oxygen incorporation cannot be adequately described by a simple dependence on growth temperature or V/III ratio due to strong interactions between these variables. In Mg-doped AlInP co-doped with oxygen, the incorporation of both Mg and O is strongly affected by an interaction between the two species, and roughly 10% of the oxygen atoms act as compensating donors.</description><identifier>ISSN: 0361-5235</identifier><identifier>EISSN: 1543-186X</identifier><identifier>DOI: 10.1007/s11664-999-0220-x</identifier><language>eng</language><publisher>Warrendale: Springer Nature B.V</publisher><subject>Incorporation ; Magnesium ; Metalorganic chemical vapor deposition ; Oxygen atoms ; Temperature dependence</subject><ispartof>Journal of electronic materials, 1999-07, Vol.28 (7), p.916-925</ispartof><rights>TMS-The Minerals, Metals and Materials Society 1999.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c1187-a094ed31b2a4d1f30ff7749f0a40e4dbfb2cd6ac652e8aa8c72b7ec3f40d25f43</citedby><cites>FETCH-LOGICAL-c1187-a094ed31b2a4d1f30ff7749f0a40e4dbfb2cd6ac652e8aa8c72b7ec3f40d25f43</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Stockman, S. 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When multiple sources of oxygen are present, a surface interaction leads to enhanced oxygen incorporation. Oxygen incorporation cannot be adequately described by a simple dependence on growth temperature or V/III ratio due to strong interactions between these variables. 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| subjects | Incorporation Magnesium Metalorganic chemical vapor deposition Oxygen atoms Temperature dependence |
| title | Oxygen incorporation in AllnP, and its effect on P-type doping with magnesium |
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