Three-chamber low-output-pressure glow-discharge-based plasma generator as a negatively charged ion source

A stationary glow discharge initiated in a two-chamber inverted gas magnetron is studied. In the third (emission) chamber, such a discharge system generates a plasma that can be subdivided into two, circumferential and near-axis, regions with considerably differing parameters and also provides a pressure difference in desired areas. It is concluded that the device suggested could be used as an efficient continuous-mode plasma generator making it possible to produce negatively charged gas ions. The results obtained may serve as a basis for negative ion source design optimization.