Piezoresistive flexible pressure sensor using vuggy clays as templates

With the rapid development of the wearable electronics, the flexible mechanical sensors have drawn much attention. However, the sensors have encountered problems such as high cost, complex process structure and low sensitivity, which limit their practical application. In this paper, we fabricate a f...

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Veröffentlicht in:Journal of materials science. Materials in electronics 2022-05, Vol.33 (14), p.11487-11497
Hauptverfasser: Du, Dawei, Ma, Xinyue, Zhao, Le, An, Wenxing, Yu, Shihui
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Sprache:eng
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Zusammenfassung:With the rapid development of the wearable electronics, the flexible mechanical sensors have drawn much attention. However, the sensors have encountered problems such as high cost, complex process structure and low sensitivity, which limit their practical application. In this paper, we fabricate a flexible piezoresistive sensor with a double-layer micro-convex structure using a simple, and low-cost PDMS inverted template technology based on a simple vuggy clay template. The sensor exhibits a high sensitivity of 0.78 kPa −1 at low pressure (
ISSN:0957-4522
1573-482X
DOI:10.1007/s10854-022-08122-y