Silver-enriched ZnO:Ag thin films deposited by magnetron co-sputtering: Post annealing effects on structural and physical properties

•ZnO:Ag films grown by DC Co-Sputtering Magnetron from Zn and Ag independent targets.•Detailed composition and structural analysis by RBS and XRD, respectively.•After annealing, Ag cubic phase and amorphous ZnO appear in the samples with higher Ag content.•PL results point out the Ag segregation and great defects reduction after annealing.•Plasmonic effect and an increase in conductivity are identified in annealed samples. The ZnO semiconductor is probably among the most mentioned compounds in the scientific literature during the last decade, which is mainly due to its wide spectrum of applications. Compounds based on ZnO (in doped or composite form) are of great relevance for the development of high-tech devices. In this work, we present the growth and characterization of samples deposited by DC Magnetron co-sputtering from two pure Zn and Ag targets in an O2 / Ar atmosphere. The samples were characterized as deposited and after an annealing treatment in a reducing atmosphere. We have used XRD, RBS, ellipsometry, UV visible photoluminescence, and electrical measurements for sample characterization. The results revealed the amorphization of ZnO when the Ag content increases and, after annealing, a mixture of crystalline phases was detected for the samples with higher Ag content. It is also demonstrated the strong effect of the presence of Ag atoms in the stimulated optical and electrical responses from ZnO:Ag compounds obtained in this work.